| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method capable of saving helium gas by not completely discharging used helium gas to the atmosphere after inspection, in a method for inspecting airtightness of a work. SOLUTION: The work 1 is stored in a chamber 2, and air in the work 1 and the chamber 2 is evacuated, and helium gas is enclosed in the work. Then, the internal pressure is raised up to a prescribed height by a compressing cylinder 17, and the leak helium gas from the work 1 to the chamber 2 is measured. Thereafter, the compressing cylinder 17 is retreated and the helium gas in the work is evacuated. COPYRIGHT: (C)2003,JPO
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