| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck obtaining high yield and a high rate of operation by reducing the generation of particles, thereby performing the removal and carriage of a substrate easily and stably. SOLUTION: The electrostatic chuck comprises a dielectric plate 41 having a surface embossed to have a plurality of protrusions 43a, an electrode 42, and an external power supply 24. Each substrate supporting surface of the plurality of protrusions is covered with conductor wiring 44 connecting the substrate supporting surfaces of the plurality of protrusions electrically. When the embossed protrusion touches the back surface of the substrate when treating the substrate, the back surface of the substrate is made to have the same potential as that of the conductor wiring by the migration of charges. Consequently, a force is prevented from being generated between the back surface of the substrate and the conductor wiring touching it, thus preventing them from rubbing together. COPYRIGHT: (C)2004,JPO |
