具备氮化层之半导体装置,申请号TW092102841-传众专利搜索

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发明名称	具备氮化层之半导体装置
摘要	本发明之半导体装置系具备有：在主表面含有源极区(20)与汲极区(21)之n型半导体基板(1)；于n型半导体基板(1)的主表面中，以覆盖源极区(20)与汲极区(21)所包夹区域之上侧的方式形成含有高介电常数材料之高介电常数绝缘膜(2)；形成在高介电常数绝缘膜(2)上方的掺硼闸极电极(6)；以及介于高介电常数绝缘膜(2)与掺硼闸极电极(6)之间所形成的高介电常数氮化层(4)。
申请公布号	TW200402881	申请公布日期	2004.02.16
申请号	TW092102841	申请日期	2003.02.12
申请人	三菱电机股份有限公司	发明人	井上真雄;土本淳一;寺本章伸
分类号	H01L29/78	主分类号	H01L29/78
代理机构		代理人	洪武雄;陈昭诚
主权项
地址	日本

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