| 摘要 |
Disclosed is an apparatus and method for inspection a circuit wiring on a circuit board. In advance of an actual inspection of the circuit board, image data on all of standard circuit wirings of a standard circuit board are extracted and registered as standard-shape or reference data (FIG. 14). An actual-image data obtained by actually inspecting a target circuit wiring is compared with the reference data through a least squares method (S 167) to determine the state of the target circuit wiring in accordance with a correlation value of the two data (S168). The comparison result is displayed on a display 21a while specifying a region from the reference data (S169).
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