发明名称 DISCHARGE DEVICE OF LIQUID AND DISCHARGE METHOD OF LIQUID, ELECTRO-OPTICAL APPARATUS AND ITS PRODUCTION METHOD, AND ELECTRONIC EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a discharge device for liquid and a discharge method of liquid, an electro-optical apparatus and its production method, and an electronic equipment, which prevents an increase in cost due to waste of the liquid, and which can easily remove bubbles from a discharge head to deal with the miniaturization of a nozzle diameter and a flow channel resulting from the miniaturization of the liquid. SOLUTION: The discharge device of the liquid has the discharge head 34, and a liquid tank 35 for storing the liquid in order to supply the liquid to the discharge head 34. Furthermore, the discharge device of the liquid is provided with a first suction member 50 covering a nozzle, a first pressure-reducing means 51 connected to the first suction member 50 so as to reduce pressure in the discharge head 34 through the first suction member 50, a second suction member 38 covering the nozzle, and a second pressure-reducing means 40 connected to the second suction member 38 so as to reduce pressure in the discharge head 34 through the second suction member 38 and to reduce pressure in the liquid tank 35 by communicating with the liquid tank 35. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004154765(A) 申请公布日期 2004.06.03
申请号 JP20030301296 申请日期 2003.08.26
申请人 SEIKO EPSON CORP 发明人 USUI TAKAHIRO
分类号 B41J2/18;B05C5/00;B05C11/10;B05D3/00;B05D7/00;B41J2/01;B41J2/165;B41J2/175;B41J2/185;B41J2/19;H01L21/48;H01L27/32;H01L51/50;H05B33/10;(IPC1-7):B05C5/00;H05B33/14 主分类号 B41J2/18
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