| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus in which, on producing an article while feeding a gas, the gas can be fed without providing level difference in a gas flow rate when a flow rate controller provided on a gas feed line is switched, and to provide a glass particulate deposition method and an apparatus therefor by which such gas feed can be realized. SOLUTION: In the middle of piping feeding a gas from one gas feed source to a production apparatus, a plurality of flow rate controllers is provided in parallel. Further, at the downstream side, a flow rate monitoring apparatus is provided. Only the one flow rate controller is used for the gas feed. On switching from the one flow rate controller to the other flow rate controller, the actual flow rate of the gas fed by the one flow rate controller is measured with a flow rate monitor. The measured value is fed-back so as to be the flow rate set value of the other flow rate controllers. The glass particulate deposition method and apparatus are thus constituted. COPYRIGHT: (C)2004,JPO
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