发明名称 PROCESS FOR FABRICATING ORGANIC SEMICONDUCTOR ELEMENT AND ORGANIC SEMICONDUCTOR ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a process for fabricating an organic semiconductor element capable of forming a low resistance electrode conveniently, and to provide an organic semiconductor element having a low resistance electrode. SOLUTION: After a gate electrode pattern is formed of a catalyst 2 using a print method at a part on a substrate 1 for forming a gate electrode 3A, the gate electrode 3A is formed by touching a plating agent causing electroless plating to the gate electrode pattern on the substrate 1 through action of the catalyst 2. After a source/drain electrode pattern is formed of the similar catalyst 2 at a part for forming a source/drain electrode 3B on an insulating layer 4 formed on the upper surface of the gate electrode 3A, similar plating agent is touched to the source/drain electrode pattern on the insulating layer 4 thus forming the source/drain electrode 3B. Finally, an organic semiconductor layer 5 is formed on the source/drain electrode 3B thus completing an organic semiconductor element. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004158805(A) 申请公布日期 2004.06.03
申请号 JP20020325532 申请日期 2002.11.08
申请人 ASAHI KASEI CORP 发明人 NAMIKATA TAKASHI
分类号 H01L21/288;H01L21/28;H01L21/336;H01L29/786;H01L51/00;H01L51/05;H01L51/40;(IPC1-7):H01L21/288 主分类号 H01L21/288
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