CHEMICAL TREATMENT APPARATUS AND CHEMICAL TREATMENT METHOD, USING CHEMICAL EFFICIENTLY WITHOUT INSTALLING COMPLEX PRESSURE CONTROL MECHANISM

摘要

PURPOSE: A chemical treatment apparatus and a chemical treatment method are provided to substantially reduce the consumption of a chemical to be used by using the chemical more efficiently without installing a complex pressure control mechanism. CONSTITUTION: A chemical treatment apparatus performs a treatment by bringing a chemical(100) into contact with a treating surface of a substrate(101) held by a substrate-holding member(102). The chemical treatment apparatus includes a cylindrical inner cell(111) and a cylindrical outer cell(121). The cylindrical inner cell includes a chemical supplying member disposed over the substrate. The cylindrical outer cell is attached on outer circumference of the inner cell and has both ends thereof exposed. The cylindrical outer cell performs a chemical treatment on the treating surface of the substrate by filling with the chemical supplied from the chemical supplying member. The outer cell is axially movable, thereby varying the width of a slit formed between a bottom end of the outer cell and a top surface of the substrate-holding member.