| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce contamination from the atmosphere when opening a container, shorten time of vacuum exhaust, and accordingly shorten a manufacturing time of an electron source or the like, in a substrate processing method to form an air-tight atmosphere with a substrate and the container covering the substrate, and to apply a prescribed processing to the substrate in the air-tight atmosphere. <P>SOLUTION: When the substrate 4 and the container 6 are separated, an air curtain is formed by blowing inactive gas or dry air into this separated region with a gas blowing jig 30. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
