PLASMA REACTOR WITH OVERHEAD RF ELECTRODE TUNED TO THE PLASMA WITH ARCING SUPPRESSION,申请号KR20047009697-传众专利搜索

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发明名称	PLASMA REACTOR WITH OVERHEAD RF ELECTRODE TUNED TO THE PLASMA WITH ARCING SUPPRESSION
摘要
申请公布号	KR20040068307(A)	申请公布日期	2004.07.30
申请号	KR20047009697	申请日期	2002.09.25
申请人		发明人
分类号	H01J37/32;H05H1/46;H01L21/205;H01L21/3065	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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