| 摘要 |
PURPOSE: A leak checking cap of semiconductor manufacturing equipment is provided to check easily the leak of a flange and a sealing cap by installing the same between the flange and the sealing cap. CONSTITUTION: A bit of semiconductor manufacturing equipment includes a vertical furnace(110), a sealing cap, a flange, a sealing cap transfer apparatus(140), and a leak checking cap. The sealing cap(130) is used for sealing selectively a lower portion of the furnace and loading a wafer boat. The flange(120) for supplying reaction gas into the furnace and exhausting the reaction gas from the furnace is installed between the furnace and the sealing cap. The leak checking cap(180) includes a cap body(181) between the flange and the sealing cap, and a sealing member(184) for sealing a lower portion of the flange.
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