发明名称 INSTALLATION FOR THE VACUUM-THERMAL TREATMENT OF MATERIALS
摘要 An installation for the vacuum-thermal treatment of materials (2) that contain at least one evaporable component features at least one heatable treatment chamber (3, 3.2, 3.3, 3.4, 3.5) with a feed opening (5) located in an overhead position that can be shut by means of a feed valve (6), with a heating device (4), with a vacuum pump, and with a condenser for discharged vapors. At least one additional treatment chamber (31) with a feed opening (34) that is located in an overhead position and can be shut by means of a feed valve (33) is correlated in a serial arrangement with at least one heatable treatment chamber (3, 3.2, 3.3, 3.4, 3.5) and with a heat exchanger (32). Above the treatment chambers (3, 3.2, .3 ¢sic; 3.3!, 3.4, 3.5 and 31) at least one transport chamber (29, 29.2) is located that is open at the bottom and can be moved in a horizontal direction, and into which the height of the material (2) fits completely and that can be connected to each of the treatment chambers (3, 3.2, 3.3, 3.4, 3.5 and 31 ) in a gas-tight and flush alignment manner. A lifting device (27) starts from the transport chamber (29, 29.2) by means of which the material (2) together with the transport chamber (29, 29.2) can be moved between a loading station (35) and an unloading station (36) from one treatment chamber (3, 3.2, 3.3, 3.4 and 3.5) to another treatment chamber (3, 3.2, 3.3, 3.4, 3.5 and 31). It is useful that at least one of the treatment chambers (31) be a cooling chamber in which the heat exchanger (32) is a cooling device. Fi ure 3
申请公布号 CA2299860(A1) 申请公布日期 2000.09.04
申请号 CA20002299860 申请日期 2000.03.02
申请人 ALD VACUUM TECHNOLOGIES GMBH 发明人 BRUCKAMP, JORG;MOLITOR, GEORGE;WANETZKY, ERWIN;MELBER, ALBRECHT
分类号 B01D1/00;B08B7/00;B09B3/00;B09C1/06;F27D7/06;F27D9/00;F27D11/02;F27D11/06;(IPC1-7):B09C1/06;B09B5/00 主分类号 B01D1/00
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