发明名称 METHOD AND DEVICE FOR CUTTING SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide substrate cutting method and device by which products (packages 5) can be efficiently produced from various sealed substrates 1 by solving various problems in the cutting of a substrate and the productivity of products can be improved. SOLUTION: Before mounting a sealed substrate 1 on which cutting portion patterns are previously aligned on an alignment stage B formed on the substrate cutting device independently of a cutting stage C to the cutting stage C, the prescribed number of markers 6 is searched, the sealed substrate 1 is mounted on the cutting stage C and then the sealed substrate 1 is cut off along the cutting portions 4 to separately form individual packages 5. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004335862(A) 申请公布日期 2004.11.25
申请号 JP20030131761 申请日期 2003.05.09
申请人 TOWA CORP 发明人 UEYAMA TOMOKI;IWATA YASUHIRO;HASHIMOTO SHINOBU
分类号 H01L21/56;H01L21/301;H05K3/00;(IPC1-7):H01L21/56 主分类号 H01L21/56
代理机构 代理人
主权项
地址