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发明名称
热处理用晶圆支持具及热处理装置
摘要
本发明系提供一不会发生因高温热处理的碰触或滑移,加工容易,可减低成本的热处理用晶圆支持具及热处理装置。本发明乃属于至少具有:支持热处理的晶圆的复数晶圆支持构件、和保持该支持构件的支持构件夹具的热处理用晶圆支持具中,前记复数晶圆支持构件中的至少一部分的支持构件系与前记晶圆的接触部,为可相对于前记支持构件夹具而转动。
申请公布号
TW200501306
申请公布日期
2005.01.01
申请号
TW093108376
申请日期
2004.03.26
申请人
信越半导体股份有限公司
发明人
今井正幸
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
林志刚
主权项
地址
日本
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