发明名称 |
Molybdenum disulfide film formation and transfer to a substrate |
摘要 |
A method is provided for forming an unsupported MoS2 layer in an aqueous medium, the method comprising the steps of: providing an assembly of a Mo oxide layer on a Si substrate; annealing said assembly in presence of H2S at a temperature sufficient for forming a MoS2 layer; and contacting the annealed assembly with an aqueous medium. This unsupported MoS2 layer can then be transferred by dip-coating to another substrate such as a dielectric substrate. |
申请公布号 |
US9472401(B2) |
申请公布日期 |
2016.10.18 |
申请号 |
US201514938657 |
申请日期 |
2015.11.11 |
申请人 |
IMEC VZW;Katholieke Universiteit Leuven, KU Leuven R & D |
发明人 |
Chiappe Daniele |
分类号 |
H01L21/02;H01L21/324;H01L29/24;C01G39/02;C01G39/06 |
主分类号 |
H01L21/02 |
代理机构 |
Knobbe Martens Olson & Bear, LLP |
代理人 |
Knobbe Martens Olson & Bear, LLP |
主权项 |
1. A method for forming an unsupported MoS2 layer in an aqueous medium, comprising:
providing an assembly of a Mo oxide layer on a Si substrate; annealing the assembly in a presence of H2S at a temperature sufficient to form an annealed MoS2 layer; and contacting the annealed assembly with an aqueous medium, whereby an unsupported MoS2 layer is obtained. |
地址 |
Leuven BE |