发明名称 Molybdenum disulfide film formation and transfer to a substrate
摘要 A method is provided for forming an unsupported MoS2 layer in an aqueous medium, the method comprising the steps of: providing an assembly of a Mo oxide layer on a Si substrate; annealing said assembly in presence of H2S at a temperature sufficient for forming a MoS2 layer; and contacting the annealed assembly with an aqueous medium. This unsupported MoS2 layer can then be transferred by dip-coating to another substrate such as a dielectric substrate.
申请公布号 US9472401(B2) 申请公布日期 2016.10.18
申请号 US201514938657 申请日期 2015.11.11
申请人 IMEC VZW;Katholieke Universiteit Leuven, KU Leuven R & D 发明人 Chiappe Daniele
分类号 H01L21/02;H01L21/324;H01L29/24;C01G39/02;C01G39/06 主分类号 H01L21/02
代理机构 Knobbe Martens Olson & Bear, LLP 代理人 Knobbe Martens Olson & Bear, LLP
主权项 1. A method for forming an unsupported MoS2 layer in an aqueous medium, comprising: providing an assembly of a Mo oxide layer on a Si substrate; annealing the assembly in a presence of H2S at a temperature sufficient to form an annealed MoS2 layer; and contacting the annealed assembly with an aqueous medium, whereby an unsupported MoS2 layer is obtained.
地址 Leuven BE