WAFER INSPECTION APPARATUS OBTAINING SIMPLE STRUCTURE THEREOF, RAPID INSPECTION AND CLASSIFICATION OF WAFERS

摘要

PURPOSE: A wafer inspection apparatus is provided to improve space efficiency and to obtain a simple structure thereof, a rapid inspection and classification of wafers. CONSTITUTION: A wafer inspection apparatus includes a sample die(10), a sample die moving unit(20), an object lens(32) and a lens driving unit(33). A wafer(1) is supported by the sample die. The sample die is moved vertically by the sample die moving unit. The wafer is observed in a position spaced apart from the surface of the wafer by the object lens. A distance between the object lens and the surface of the wafer supported by the sample die is adjusted by the lens driving unit.