发明名称 TAPE BONDING APPARATUS AND TAPE BONDING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a tape bonding apparatus and a tape bonding method which enable a tape member to be preferably bonded to a work, simplify the steps, and reduce the cost. SOLUTION: A tape bonding apparatus 10 for bonding a tape member 12 to a work 11, comprising a rubber sheet 25 having the work 11 on its top surface, a first vacuum chamber 50 positioned on the top surface of the rubber sheet 25, a second vacuum chamber 51 positioned on the undersurface of the rubber sheet 25, a holding member 26 for holding the rubber sheet 25 without passing air between the first and second vacuum chambers 50 and 51, a tape holding means 28 for holding the tape member 12 in a stretching manner and positioning the tape member 12 above the work 11, a first suction means 36 for evacuating the first vacuum chamber 50, a first air introducing means 37 for introducing air into the first vacuum chamber 50, a second suction means 36 for evacuating the second vacuum chamber 51, and a second air introducing means 41 for introducing air into the second vacuum chamber 51. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005093987(A) 申请公布日期 2005.04.07
申请号 JP20040154047 申请日期 2004.05.25
申请人 TSUBAKI SEIKO:KK 发明人 SAITO KOICHI;SUZUKI TETSUJI
分类号 H01L21/683;H01L21/304;H01L21/68;(IPC1-7):H01L21/304 主分类号 H01L21/683
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