| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a planar optical waveguide in which production is made easy and various materials are applicable, to provide a planar optical waveguide produced by the manufacturing method and to provide an electro-optical composite wiring substrate having the planar optical waveguide. SOLUTION: The manufacturing method is provided with at least a step A in which a bottom section clad layer 12 is formed on a substrate 11, a step B in which a core pattern 13 that is a negative of a core is formed on a top surface 12a of the bottom section clad layer 12 provided on the substrate by photolithography, a step C in which a core material 14 is filled into an opening section 13a and hardened and a step D in which the negative of the core pattern 13 is removed after the core material 14 is hardened. COPYRIGHT: (C)2005,JPO&NCIPI |
