| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape correction method and a shape correction device that allow one-time measurement to make optimal shape corrections with respect to measurement data.SOLUTION: A surface shape measurement device is configured to make a first shape correction removing a specific shape component from measurement data obtained by scanning a surface of a workpiece to generate shape correction data; detect a boundary between a first section suitable for the first shape correction and a second section unsuitable for the first shape correction from the shape correction data; divide the measurement data into a plurality of sections; determine a category of a shape component to be removed from the measurement data in the first section as the specific shape component; individually obtain correction values upon removing shape components of a plurality of categories respectively from the measurement data in the second section to compare the correction values, and thereby determine the category of the shape component to be removed from the measurement data in the second section; and make a second shape correction removing the shape component of the category determined for each of a plurality of sections with respect to the measurement data.SELECTED DRAWING: Figure 13 |
