发明名称 Variable capacitance
摘要 A variable capacitance formed in a semiconductor substrate with a ribbed surface, having a first electrode formed of all the ribs protruding from the substrate, of portions of the substrate underlying the ribs, and of at least portions of the substrate separating the bases of two ribs, having a second electrode superposed to at least one portion of the first electrode. The ribs are irregular in terms of cross-section and/or planar base surface area.
申请公布号 US6979852(B2) 申请公布日期 2005.12.27
申请号 US20030669107 申请日期 2003.09.23
申请人 STMICROELECTRONICS S.A. 发明人 POVEDA PATRICK
分类号 H01L29/93;H01L29/94;(IPC1-7):H01L27/108;H01L29/76 主分类号 H01L29/93
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