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发明名称
METHOD FOR MANUFACTURING A FINFET
摘要
申请公布号
KR20060005041(A)
申请公布日期
2006.01.17
申请号
KR20040053866
申请日期
2004.07.12
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, SUNG YOUNG;SHIN, DONG SUK
分类号
H01L21/336;H01L21/20;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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