FILLING CAVITIES IN AN INTEGRATED CIRCUIT AND RESULTING DEVICES

摘要

A methodology enabling filling of high aspect ratio cavities, with no voids or gaps, in an IC device and the resulting device are disclosed. Embodiments include providing active area and/or gate contacts in a first ILD; forming selective protective caps on upper surfaces of the contacts; forming a second ILD on upper surfaces of the protective caps and on an upper surface of the first ILD; forming a hard-mask stack on the second ILD; forming, in the second ILD and hard-mask stack, cavities exposing one or more protective caps; removing selective layers in the stack to decrease depths of the cavities; and filling the cavities with a metal layer, wherein the metal layer in one or more cavities connects to an upper surface of the one or more exposed protective caps.

主权项

1. A device comprising:
active area and/or gate contacts in a first interlayer dielectric (ILD); selective protective caps on upper surfaces of the contacts; a second ILD on upper surfaces of the protective caps and on an upper surface of the first ILD; and vias through the second ILD down to the protective caps.