| 发明名称 |
SEMICONDUCTOR DEVICE HAVING VERTICAL SEMICONDUCTOR PILLARS |
| 摘要 |
A semiconductor device includes a plurality of substantially vertical semiconductor pillars on a substrate, and a hard mask layer overlying the plurality of semiconductor pillars. A contiguous portion of the hard mask layer connects two or more of the plurality of semiconductor pillars. |
| 申请公布号 |
US2017084691(A1) |
申请公布日期 |
2017.03.23 |
| 申请号 |
US201615370721 |
申请日期 |
2016.12.06 |
| 申请人 |
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION ;SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION |
发明人 |
HONG ZHONGSHAN |
| 分类号 |
H01L29/06;H01L21/308;H01L21/3065 |
主分类号 |
H01L29/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor device, comprising:
a plurality of substantially vertical semiconductor pillars on a substrate; and a hard mask layer overlying the plurality of semiconductor pillars; wherein a contiguous portion of the hard mask layer connects two or more of the plurality of semiconductor pillars. |
| 地址 |
Beijing CN |
