| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a physical quantity sensor that can form a recess accurately.SOLUTION: The method for manufacturing a physical quantity sensor includes steps (S10 to S16) of forming a recess in a base plate and a step (S20) of forming a functional element on the recess. The recess formation step includes the step (S10) of forming a first resist on a base plate, the step (S12) of performing first etching on the base plate with the first resist as a mask, the step (S14) of forming a second resist on an area behind the outer edge of the region where the first resist is formed, in planar view, and the step (S16) of performing second etching on the base plate with the second resist as a mask.SELECTED DRAWING: Figure 4 |
