APPARATUS FOR SUPPLYING MEASURED AMOUNT OF SOURCE MATERIAL FOR SEMICONDUCTOR MANUFACTURING PROCESS

摘要

Disclosed is an apparatus for supplying a measured amount of source material for a semiconductor manufacturing process, the apparatus according to one embodiment of the present invention comprising: a source material storage tank for storing the source material; a measurement container to which source material from the source material storage tank is supplied and stored, and having an opening on the top and a set storage capacity; a source material sensing unit for accommodating the source material overflowing through the opening of the measurement container and sensing the source material; and source supply can for receiving the source material from the measurement container, the amount of the source material corresponding to the set storage capacity of the measurement container.