发明名称 MANUFACTURE OF THIN FILM
摘要 PURPOSE:To manufacture thin film of uniform thickness which is easily reproducable by arranging a capturing board for evaporation material between evaporation material and substrate in order to decrease evaporation rate of the material in forming film of evaporation material on substrate set above the evaporation material.
申请公布号 JPS5339983(A) 申请公布日期 1978.04.12
申请号 JP19760114388 申请日期 1976.09.25
申请人 OKI ELECTRIC IND CO LTD 发明人 NOMOTO TSUTOMU;YODA TAKEO
分类号 C23C14/24 主分类号 C23C14/24
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