发明名称 DEVICE FOR SUPPORTING MONOCRYSTAL
摘要 In an apparatus for crucible-free zone melting, a device for supporting a lower end of the crystalline rod of semiconductor which has a junction with a seed crystal characterized by the support device being formed by a plurality of sections or parts which are moveable relative to each other from a first position spaced or retracted from the seed crystal and the lower end of the rod to enable melting the rod adjacent to the junction and a second position forming a container surrounding the seed crystal and the lower end of the rod for receiving a supporting or stabilizing medium which dampens or prevents vibrations from being applied to the lower end of the rod and the junction. The sections are held in the second position by a holding means which may either be electromagnetic or mechanical.
申请公布号 SU656476(A3) 申请公布日期 1979.04.05
申请号 SU19752191804 申请日期 1975.11.20
申请人 SIEMENS AG 发明人 GERKHARD BAROVSKI,DT;VOLFGANG KELLER,DT;GERKHARD SHRETTER,DT
分类号 C30B13/00;C30B13/28;C30B13/32;H01L21/208;(IPC1-7):01J17/10 主分类号 C30B13/00
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