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申请公布号
JPS5528235(B2)
申请公布日期
1980.07.26
申请号
JP19720012863
申请日期
1972.02.07
申请人
发明人
分类号
H01L25/07;H01L21/322;H01L21/331;H01L29/73;H01L29/744;H01L29/861
主分类号
H01L25/07
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