| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device for controlling a position of a stage by reading scales using sensors, which offers position control that is not or less influenced by thermal expansion of the stage.SOLUTION: A stage device having a first stage and a second stage that is movable in a first direction relative to the first stage includes sensors 9a, 9b configured to move in the first direction together with the second stage to read scales, and a sensor base 15 made of a material having a thermal expansion rate smaller than that of the first stage and designed to fix the sensors 9a, 9b onto the first stage. The sensor base 15 of the stage device is fixed to the first stage at two fixing points located in the proximity of a second axis, which extends in a second direction perpendicular to the first direction and passes through a specific point, with the specific point located therebetween, and is also fixed, in a manner that allows movement thereof in the first direction, to the first stage at a fixing point in the proximity of a first axis extending in the first direction and passing through a specific point and in the proximity of the arrangement positions of the sensors 9a, 9b.SELECTED DRAWING: Figure 5 |
