| 发明名称 | Mask and method for manufacturing semiconductor device | ||
| 摘要 | A mask may be used in a process for manufacturing a semiconductor device. The semiconductor device may include a source line, a first drain contact terminal, and a second drain contact terminal. The mask may include the following elements: a source-line corresponding light-transmitting portion, which corresponds to the source line; a first-drain-contact-terminal corresponding light-transmitting portion, which corresponds to the first drain contact terminal; a second-drain-contact-terminal corresponding light-transmitting portion, which corresponds to the second drain contact terminal; and a first light-blocking portion, which abuts at least one of the source-line corresponding light-transmitting portion, the first-drain-contact-terminal corresponding light-transmitting portion, and the second-drain-contact-terminal corresponding light-transmitting portion. | ||
| 申请公布号 | US9524880(B2) | 申请公布日期 | 2016.12.20 |
| 申请号 | US201514739876 | 申请日期 | 2015.06.15 |
| 申请人 | Semiconductor Manufacturing International (Shanghai) Corporation | 发明人 | Li Shaobin;Yang Yun;Chiu Shengfin |
| 分类号 | H01L21/285;H01L21/311;H01L21/768;H01L21/308 | 主分类号 | H01L21/285 |
| 代理机构 | Innovation Counsel LLP | 代理人 | Innovation Counsel LLP |
| 主权项 | 1. A mask for use in manufacturing of a semiconductor device, the semiconductor device comprising a source line, a first drain contact terminal, and a second drain contact terminal, the mask comprising: a source-line corresponding light-transmitting portion, which corresponds to the source line; a first-drain-contact-terminal corresponding light-transmitting portion, which corresponds to the first drain contact terminal; a second-drain-contact-terminal corresponding light-transmitting portion, which corresponds to the second drain contact terminal and is smaller than the source-line corresponding light-transmitting portion; and a first light-blocking portion, which abuts at least one of the source-line corresponding light-transmitting portion, the first-drain-contact-terminal corresponding light-transmitting portion, and the second-drain-contact-terminal corresponding light-transmitting portion. | ||
| 地址 | CN | ||