发明名称 BLANK AND PROCESS FOR THE FORMATION OF BEAM LEADS FOR IC CHIP BONDING
摘要 <p>BLANK AND PROCESS FOR THE FORMATION OF BEAM LEADS FOR IC CHIP BONDING A three-layer blank and a process are disclosed for the formation of frames of metal beam leads that are bonded to integrated circuit chips. The blank incorporates an improved negative-working resist having adhesion to the metal as well as flexibility. The process of forming the leads includes the step of fully photopolymerizing the resist to avoid outgassing of residual monomer as would otherwise occur during bonding.</p>
申请公布号 CA1132830(A) 申请公布日期 1982.10.05
申请号 CA19790336856 申请日期 1979.10.02
申请人 EASTMAN KODAK COMPANY 发明人 GUILD, JOHN R.
分类号 G03F7/033;G03F7/095;H01L21/48;H01L23/495;(IPC1-7):03C1/94;01L21/312 主分类号 G03F7/033
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