发明名称 |
BLANK AND PROCESS FOR THE FORMATION OF BEAM LEADS FOR IC CHIP BONDING |
摘要 |
<p>BLANK AND PROCESS FOR THE FORMATION OF BEAM LEADS FOR IC CHIP BONDING A three-layer blank and a process are disclosed for the formation of frames of metal beam leads that are bonded to integrated circuit chips. The blank incorporates an improved negative-working resist having adhesion to the metal as well as flexibility. The process of forming the leads includes the step of fully photopolymerizing the resist to avoid outgassing of residual monomer as would otherwise occur during bonding.</p> |
申请公布号 |
CA1132830(A) |
申请公布日期 |
1982.10.05 |
申请号 |
CA19790336856 |
申请日期 |
1979.10.02 |
申请人 |
EASTMAN KODAK COMPANY |
发明人 |
GUILD, JOHN R. |
分类号 |
G03F7/033;G03F7/095;H01L21/48;H01L23/495;(IPC1-7):03C1/94;01L21/312 |
主分类号 |
G03F7/033 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|