| 摘要 |
PURPOSE:To improve abrasion resistance, corrosion resistance and acid resistance by forming a film of a high m.p. compd. on a substrate surface by a chemical vapor deposition treatment then cooling the same forcibly from the temp. at which a hardening effect appears. CONSTITUTION:A film of carbide or nitride of metals selected among Si, B, group 4a, 5a, 6a metals of periodic law table, or oxide of Al, Cr is formed on the surface of a substrate 21 in a vessel 31 by a chemical vapor deposition treatment. After the formation, a treating jig 20 placed thereon with the substrate 21 is detached from a desorbing part 15 for electrode and is moved by a moving device 34 into a cooling chamber 32 which is held evacuated at the same pressure as that in the vessel 31. A sluice valve 33 is closed, and a cooling gas is introduced from a gas producer 30 through an introducing part 35 for cooling gas into the chamber 32 and the substrate 21 is cooled forcibly with a fan 36. Thus the hardening of the substrate 21 is completed. |
