ELECTRO-OPTIC DEVICE, METHOD FOR MANUFACTURING ELECTRO-OPTIC DEVICE, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an electro-optic device capable of suppressing intrusion of moisture through a boundary between a spacer and a light-transmitting cover into a space where a mirror is disposed, a method for manufacturing an electro-optic device, and an electronic apparatus.SOLUTION: An electro-optic device 100 includes a mirror 50 formed on an element substrate 1, which is encapsulated by a frame-like spacer 61 and a planar light-transmitting cover 71 adhered to the spacer 61. An inorganic barrier layer 81 such as an aluminum oxide layer, a silicon oxide layer and a silicon nitride layer is formed on an outer surface 61w of the spacer 61 and on a side face 71w of the light-transmitting cover 71; and the inorganic barrier layer 81 covers a boundary 67 between the spacer 61 and the light-transmitting cover 71. The inorganic barrier layer 81 is formed into a continuous state from the outer surface 61w of the spacer 61 to the side face 71w of the light-transmitting cover 71.SELECTED DRAWING: Figure 4