| 摘要 |
<p>PURPOSE:To inexpensively obtain a high-performance thermal head, by producing both electrode parts and a temperature sensor part by using an aluminum film. CONSTITUTION:A mixed amorphous film of Ta-SiC is formed as a heating resistor material on a substrate, and after a stabilizing treatment, heating resistor dots 1 are produced in a desired pattern. After forming the aluminum film on the entire surface by a vapor-depositing device, a common electrode 2, individual electrodes 3, a temperature sensor 4, temperature sensor electrodes 5 are simultaneously produced in respective desired patterns. A film of SiC is provided as a protective layer on a sliding part of the head by sputter coating.</p> |
