| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive heat-resistant substrate pedestal module that is unlikely to break under high pressure differentials exerted during processing.SOLUTION: A substrate pedestal module includes: a platen 205; a stem 210 having a side wall 211 defining a cylindrical interior region, a lower surface 213, and an upper end that supports the platen; and an adapter 220 having a side wall defining a cylindrical interior region and an upper surface that supports the stem. The lower surface of the stem includes a gas inlet 216 in fluid communication with a corresponding gas passage 217 located in the side wall of the stem, and a gas outlet 224 located in an annular gas channel 242 in the upper surface of the adapter. The upper surface of the adapter includes an inner groove 226 located radially further inside than the gas inlet and an outer groove 227 located radially further outside than the inner groove. The inner groove and the outer groove have respective O-rings 230, 231 so as to form vacuum seals during processing.SELECTED DRAWING: Figure 2 |
