| 摘要 |
PURPOSE:To make high-precision measurement possible by arrannging a pressure sensor and a diaphragm closely to each other to reduce the inside capacity of a pressure receiving chamber. CONSTITUTION:A through hole 1a is formed in a columnar block 1 to be a body, and the diameter in the high-pressure side of this hole 1a is slightly larger than that in the low-pressure side, and a space part 1b which has the same center as the through hole 1a and has a diameter larger than that of the through hole 1a is formed on the high pressure-side end face of the columnar block 1. A pressure sensor 2 consists of a silicone diaphragm which functions as a pressure electricity transducer, and the pressure sensor 2 is fixed airtightly to one end of a cylindrical holder 2a. This cylindrical holder 2a is formed with a glass which has the same coefficient of expansion as the pressure sensor. The other end-side part of the cylindrical holder 2a is attached to the small-diameter part of the through hole 1a of the columnar block 1 airtightly to arrange the pressure sensor in the space part 1b, and a relaying board 3 consisting of a print plate is provided around the pressure sensor 2 with a gap between them. |
