| 摘要 |
PURPOSE:To position a substrate accurately in a high speed, by positioning the substrate preliminarily and detecting its positional deviation with an image sensor to control a positioning table. CONSTITUTION:A substrate 11 is put in a guide groove 12 of a carrying-in part and is carried to a table 14 and is positioned onto a reference face 14a by a pressing piece 15. In case of accurate positioning, a position mark 11a provided preliminarily on the substrate 11 is measured by an image sensor 16 to detect the deviation in the carrying direction, and said table 14 is controlled to correct the position of the substrate 11 in accordance with this positional deviation quantity. With respect to this measurement of the positional deviation, the mark 11a is latched in a shift register 23 by said sensor 16 and shifted successively by a clock signal, and a counter 24 is stopped in the position of said mark 11a, and count counts are used as a measurement signal. |
