| 摘要 |
PURPOSE:To obtain a soft X-ray generating device capable of triggering its discharge tube without fail by providing a triggering electrode close to one electrode of the discharge tube and connecting the triggering electrode to the other electrode via a series circuit comprising a small capacity condenser and a resistance. CONSTITUTION:A condensor 1 is charged to high voltage, and connected to an inductor 3 via a switch 2. A discharge tube 4 is provided with electrodes 5, 6 facing to each other, and connected to the inductor 3 in parallel. A triggering electrode 8 is arranged at the central portion of the electrode 5, and the same electrode 8 is connected to an electrode 6 via a series circuit comprising a small capacity condenser 10 and a resistance 11. In addition, the electrode 8 is also connected to the electrode 5 via a diode 12. Here, the central portion of the electrode 6 forms a cavity, and connected with a steel gas cylinder via a high speed changeover valve 7. Thus, it is possible to trigger a gas puff type soft X-ray source for its discharge without fail. |
