发明名称 MINUTE-PATTERN OBSERVING METHOD OF THIN-FILM MAGNETIC HEAD
摘要 PURPOSE:To make it possible to perform accurate observation, by observing a minute pattern through a liquid having the same refractive index as that of a protecting film, thereby eliminating the lens effect yielded by the curve of the protecting film. CONSTITUTION:The minute pattern of a thin-film magnetic head is coated by a protecting film 4, which is formed by sputtering. The entire thin-film magnetic head is immersed in a container 8, in which a liquid 9 having the same refractive index as that of the protecting film 4 is contained. The minute pattern is magnified and observed by a microscope 7 through the liquid 9. In this method, the lens effect of a curved part 5 of the protecting film due to the difference in refractive indexes of air and the film is eliminated, and a distance L between a tip part 6 of the head and a coil conductor 3 can be accurately observed. Thus the lens effect caused by the curve of the protecting film is eliminated and the accurate observation can be performed.
申请公布号 JPS60133307(A) 申请公布日期 1985.07.16
申请号 JP19830243173 申请日期 1983.12.22
申请人 FUJITSU KK 发明人 KANAI HITOSHI;TAKAHASHI YOSHIO
分类号 G01B11/00;G01B11/24;G11B5/31;G11B5/455 主分类号 G01B11/00
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