| 摘要 |
PURPOSE:To prevent the occurrence of defects as a result of damage to a diaphragm, by using pure water as a working fluid, in case of a pump which generates high pressure via the diaphragm. CONSTITUTION:Pure water W is given to a pressing chamber 21 and a working fluid chamber 12 from a pure water generator 30, and this pure water is used for a working fluid in place of conventional oils. Now, supposing that a diaphragm 19 is damaged, the pure water W in the pressing chamber 21 and the working fluid chamber 12 is merely entered in a flushing route, so that the pure water W is spouted out of a nozzle as usual as ever, and there is no hindrance to flushing work, thus defects are preventable from occurring. |
