SOLID FACE ANALYZER FOR RANDOM AREA

摘要

PURPOSE:To display the profile of the boundary of analyzing area on the surface of specimen while to discriminate the inside and the outside of analyzing area by providing an index in the analyzing area or displaying the profile with bright line. CONSTITUTION:A mask 15 of desired shape is placed in front of a cathode ray tube 14 to detect the light 16 passed through said mask 15 by means of a photodetector element 17. While a signal corresponding with ON-OFF signal of the light 16 is produced from a gate signal generator 18. Gate 11 is opened/closed by means of a signal from said generator 18 to take out only the secondary ion from the analyzing area. The signal from said generator 18 is also fed to a profile display 23. The output signal from the display 23 is added to an adder 20 thus to display the analyzing area as a profile onto the image on CRT21. Consequently, the profile of the boundary of analyzing area on the surface of specimen can be displayed while the inside and the outside of the analyzing area can be discriminated.