| 摘要 |
The incident and/or translucent light microscope has a vertical stand construction (1; 2), a vertical object-holder plate (5) and a horizontal optical axis (7) perpendicular to the object-holder plate (5). In a form of execution, the microscope casing comprises at least two support parts (11; 12) vertically arranged one behind the other and connected by a support plate (13). The vertical object-holder plate (5) is arranged between the two support parts (11; 12) perpendicularly to the horizontal optical axis (7). In either alternative, the angle alpha between the vertical plane (63) and the plane of the object-holder plate and, consequently the angle delimited between the horizontal and the optical axis (7) may reach 30<o> according to the relation 0<o><= alpha <=30<o>. In all forms of execution, a contamination-free manipulation is achieved in the object area by means of an arrangement using a laminar flow enabling the inspection of large surface objects (6), particularly wafers. The user (47) may execute all manipulations and observations by means of ergonomically-designed control desks (35, 55) located outside the critical region of the object. The apparatus may be the center of an automatic processing and computing installation for the inspection and measurement of wafers. |
