Near-infrared absorbing film compositions

摘要

A curable liquid formulation comprising: (i) one or more near-infrared absorbing polymethine dyes; (ii) one or more crosslinkable polymers; and (iii) one or more casting solvents. The invention is also directed to solid near-infrared absorbing films composed of crosslinked forms of the curable liquid formulation. The invention is also directed to a microelectronic substrate containing a coating of the solid near-infrared absorbing film as well as a method for patterning a photoresist layer coated on a microelectronic substrate in the case where the near-infrared absorbing film is between the microelectronic substrate and a photoresist film.

主权项

1. A curable liquid formulation comprising:
(i) at least one near-infrared absorbing polymethine dye; (ii) at least one crosslinkable polymer comprising at least one crosslinkable unit, wherein the crosslinkable polymer is a copolymer, terpolymer, or higher order polymer comprising at least one aromatic- or polycyclic-containing unit selected from the group consisting of:  wherein n is a value of at least 1; (iii) at least one casting solvent; and (iv) an acid generator selected from:  and triethylammonium nonafluorobutane sulfonate.