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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPS6295841(A)
申请公布日期
1987.05.02
申请号
JP19850235158
申请日期
1985.10.23
申请人
HITACHI LTD
发明人
KANAI NORIO;TAMURA NAOYUKI
分类号
H01L21/677;B65G1/00;B65G1/02;H01L21/67;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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