| 摘要 |
PURPOSE:To stably treat a silane coupling agent by reducing the pressure in a vessel prior to the treatment then evaporating the silane coupling agent to a prescribed pressure. CONSTITUTION:The pressure in the pressure reduction vessel 1 contg. the silane coupling agent 10 put into a container 11 is evacuated by a vacuum pump to the prescribed pressure to evaporate the silane coupling agent. The pressure in the pressure reduction vessel 2 contg. a glass substrate 5 is evacuated to the prescribed pressure. The evaporation of the silane coupling agent progresses in the pressure reduction vessel 1 and after the pressure increases to the prescribed pressure, gaseous nitrogen is introduced into the pressure reduction vessel 1 and a valve 4 provided to a piping 3 connecting the two pressure reduction vessels 1, 2 is opened to introduce the silane coupling agent vapor together with the gaseous nitrogen introduced into the pressure reduction vessel 1 into the pressure reduction vessel 2. The surface of the glass substrate 5 is treated for the prescribed time and thereafter, the introduction of the nitrogen into the pressure reduction vessel 1 is stopped and the valve 4 is closed. The pressure in the pressure reduction vessel 2 is again reduced and after the silane coupling agent vapor is discharged together with the gaseous nitrogen, the gaseous nitrogen is introduced into the pressure reduction vessel 2 and the treated substrate 2 is stored until the substrate is used. |
