| 摘要 |
PURPOSE:To improve resistance against abrasion and corrosion by forming a ceramic thin coat on the surfaces of a valve proper and a valve seat for a valve to control a flow amount using the displacement of a piezo-electric element. CONSTITUTION:A valve seat 7 having a valve port 3 is provided, projecting from a valve body 1 to the inside of a valve chamber 11. A valve proper 8 is sandwiched between the valve body 1 and a housing 2 via an O-ring 17. At least more than one layer of a valve surface thin ceramic coat 14 and a valve seat surface ceramic thin coat 19 are formed on the upper surfaces of the valve proper 8 and a valve seat 7 contacting and separating from each other. According to the aforesaid constitution, resistance against abrasion and corrosion can be improved.
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