发明名称 LASER SAMPLING METHODS FOR REDUCING THERMAL EFFECTS
摘要 A method for reducing thermal effects in laser ablation optical emission spectrometry includes creating discrete ablation spots along an analysis line on a target surface. At least one of the following is also carried out. First, the ablation spots are positioned so that a pair of successive ablation spots are spaced apart from one another along the analysis line and are separated from one another by another ablation spot. Second, when the analysis line comprises generally parallel, adjacent analysis line segments, the ablation spots are positioned so that (A) a pair of successive ablation spots are on different analysis line segments, and (B) the successive ablation spots are positioned to be at different longitudinal positions along the analysis line segments when the different analysis line segments are adjacent to one another. As a result, a linear scan of isolated ablation spots can be generated.
申请公布号 EP2972240(A4) 申请公布日期 2016.10.26
申请号 EP20140764585 申请日期 2014.03.14
申请人 ELECTRO SCIENTIFIC INDUSTRIES, INC. 发明人 O'CONNOR, CIARAN, JOHN, PATRICK
分类号 G01N21/71;G01N21/63;H05H1/30 主分类号 G01N21/71
代理机构 代理人
主权项
地址