| 摘要 |
PURPOSE:To prevent the deterioration of magnetic characteristics by covering the surface of a lower magnetic film formed on an underlying layer provided on a substrate surface with a nonmagnetic metallic film so that the oxidation of the lower magnetic film is obviated even if heat is applied repeatedly thereto in the ensuing production process. CONSTITUTION:The underlying layer 2 is provided on the substrate 1 and approximately the entire surface of the lower magnetic film 3 provided on the underlying layer 2 is coated with the nonmagnetic metallic film 10. The nonmagnetic metallic film 10 is formed by using a nonmagnetic metallic material such as chromium, titanium or aluminum and forming the same to a thin film having substantially no pinholes by a sputter film forming method. Since the surface of the lower magnetic film 3 is coated with the nonmagnetic metallic film 10, the nonmagnetic metallic film 10 acts as a protective film to the lower magnetic film 3 and is capable of preventing the lower magnetic film 3 from being corroded and oxidized even if the heat is repeatedly applied thereto or even if the film is immersed in a resist stripping liquid, etc., in the production process after the nonmagnetic metallic film 10 is formed. |
