| 摘要 |
PURPOSE:To have no influence of dynamic pressure by providing a movable plate at least partially supported, which is flexed in the direction of board thickness using the supported portion as a flexible shaft when voltage is applied. CONSTITUTION:When voltage is applied, a movable plate 10 is fixed in the direction of board thickness, and a valve element 14 is shifted laterally opposite to a valve port 15. The flexure of the movable plate 10 is changed depending upon the magnitude of voltage to change the opening degree of the valve port 15. As the valve element 14 is disposed vertically to a flexible shaft on extension substantially parallel to a flexible shaft 12 of the movable plate 10, dynamic pressure produced by flowing of a fluid exerts stress in the direction substantially parallel to the flexible shaft 12 of the movable plate 10 through the valve element 14. The rigidity against bending stress in the direction substantially parallel to the flexible shaft 12 of the movable plate 10 is markedly larger than the rigidity in the direction of board thickness to hardly be influenced by dynamic pressure.
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