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发明名称
FORMATION OF CRYSTAL
摘要
申请公布号
JPS6452694(A)
申请公布日期
1989.02.28
申请号
JP19870208248
申请日期
1987.08.24
申请人
CANON INC
发明人
ICHIKAWA TAKESHI
分类号
C30B29/06;C30B25/00;H01L21/205
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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